Equipment for growth process
- MOCVD system for GaAs
- MOCVD system for GaN
- MOCVD system for GaInNAs
- MBE system I
- MBE system II
- STM located inside MBE
- Organic device fabrication system
Equipment for measurement
- High-resolusion SEM (1)
- High-resolusion SEM (2)
- Multi-mode AFM
- Contact-mode AFM
- High-vaccum STM
- Laser system (1) (Mira, Regen
- Laser system (2) (Mira-Seed)
- Triple-grating monochromator
- FTIR
- Evaluation system for electrical measurement
- High-resolution XRD
- UV-vis-NIR-spectrophotometer
- Photoelectron spectroscopy in air
- Blue-laser microscope
Equipment for device process
- Electron beam lithography
- ICP reactive ion etching
- Semiconductor laser chip bonder
- Wire bonder
- Sputtering systems
- Electron beam evaporator